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Simultaneous Interaction of Methyl Radicals and Atomic Hydrogen with Amorphous Hydrogenated Carbon Films

MPS-Authors
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von Keudell,  A.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

von Keudell, A., Schwarz-Selinger, T., & Jacob, W. (2001). Simultaneous Interaction of Methyl Radicals and Atomic Hydrogen with Amorphous Hydrogenated Carbon Films. Journal of Applied Physics, 89, 2979-2986. Retrieved from http://scitation.org/jap.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-4581-F
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