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Characterisation of α-Phase Aluminium Oxide Films Deposited by Filtered Vacuum Arc

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Koch,  F.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

Maier,  H.
Max Planck Society;

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Bolt,  H.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Yamada-Takamura, Y., Koch, F., Maier, H., & Bolt, H. (2001). Characterisation of α-Phase Aluminium Oxide Films Deposited by Filtered Vacuum Arc. Surface and Coatings Technology, 142-144, 260-264. Retrieved from http://www.sciencedirect.com/science/journal/02578972.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-4938-C
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