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Thermische Zersetzung und H-induzierte Erosion dünner a-C:H Schichten

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Zecho,  T.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Zecho, T. (2001). Thermische Zersetzung und H-induzierte Erosion dünner a-C:H Schichten. PhD Thesis, Universität Bayreuth, Bayreuth.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-4973-6
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