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Conference Paper

Diagnostics of Electron Distribution Functions in Planar ICP Sources

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Fantz,  U.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;

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Starke,  P.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;

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Ondak,  T.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fantz, U., Starke, P., & Ondak, T. (2001). Diagnostics of Electron Distribution Functions in Planar ICP Sources. In T. Goto (Ed.), Proceedings of the 25th International Conference on Phenomena in Ionized Gases (pp. 201-202). Nagoya: University of Nagoya.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-4A50-C
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