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Conference Paper

Formation of Polymer-Like Hydrocarbon Films from Radical Beams of Methyl and Atomic Hydrogen

MPS-Authors
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Meier,  M.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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von Keudell,  A.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Meier, M., & von Keudell, A. (2001). Formation of Polymer-Like Hydrocarbon Films from Radical Beams of Methyl and Atomic Hydrogen. In A. Bouchoule (Ed.), Proceedings of the 15th International Symposium on Plasma Chemistry (pp. 239-244). CNRS.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-51B3-F
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