English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Journal Article

Novel method for absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen

MPS-Authors
/persons/resource/persons110460

Schwarz-Selinger,  T.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109597

von Keudell,  A.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

External Resource
No external resources are shared
Fulltext (restricted access)
There are currently no full texts shared for your IP range.
Fulltext (public)
There are no public fulltexts stored in PuRe
Supplementary Material (public)
There is no public supplementary material available
Citation

Schwarz-Selinger, T., von Keudell, A., & Jacob, W. (2000). Novel method for absolute quantification of the flux and angular distribution of a radical source for atomic hydrogen. Journal of Vacuum Science and Technology A, 18, 995-1001.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-5C4B-3
Abstract
There is no abstract available