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Depth of Origin of Atoms Sputtered from WyC1-y Compounds and the Pure Elements. A TRIM.SP and TRIDYN Simulation Study

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein, W., & Shulga, V. I. (2000). Depth of Origin of Atoms Sputtered from WyC1-y Compounds and the Pure Elements. A TRIM.SP and TRIDYN Simulation Study. Nuclear Instruments and Methods in Physics Research B, 164-165, 748-754. Retrieved from http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TJN-4019CCX-3C-19&_cdi=5315&_user=100196&_orig=browse&_coverDate=04%2F30%2F2000&_sk=998359999&view=c&wchp=dGLbVzz-zSkWW&md5=b46fcfa0871b7080431c216f4d813f95&ie=/sdarticle.pdf.


引用: https://hdl.handle.net/11858/00-001M-0000-0027-5E09-7
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