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Erosion of metal-doped amorphous carbon films by oxygen containing plasma discharges

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Elorriaga-Rico,  M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Elorriaga-Rico, M. (2011). Erosion of metal-doped amorphous carbon films by oxygen containing plasma discharges. Diploma Thesis, Universidad de Navarra, Navarra.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-E86E-3
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