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Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardement: experiment and modeling

MPS-Authors
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Mutzke,  A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schneider,  R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Bizyukov, I., Mutzke, A., Schneider, R., & Davis, J. (2010). Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardement: experiment and modeling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(17-18), 2631-2638. doi:10.1016/j.nimb.2010.06.035.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0026-F139-C
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