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Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films

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Adelhelm,  C.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Balden,  M.       
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Adelhelm, C., Balden, M., Rinke, M., & Stüber, M. (2009). Influence of doping (Ti, V, Zr, W) and annealing on the sp2 carbon structure of amorphous carbon films. Journal of Applied Physics, 105: 033522 (9pp). doi:10.1063/1.3075843.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-F40D-B
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