Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic 
arc deposition

Adelhelm, C.; Pickert, T.; Balden, M.; Rasinski, M.; Plocinski, T.; Ziebert, C.; Koch, F.; Maier, H.

doi:10.1016/j.scriptamat.2009.06.031

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Journal Article

Monoclinic B-phase erbium sesquioxide (Er₂O₃) thin films by filtered cathodic arc deposition

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Adelhelm, C.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Pickert, T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Balden, M.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Rasinski, M.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Koch, F.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

Maier, H.
Max Planck Society;

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Citation

Adelhelm, C., Pickert, T., Balden, M., Rasinski, M., Plocinski, T., Ziebert, C., et al. (2009). Monoclinic B-phase erbium sesquioxide (Er₂O₃) thin films by filtered cathodic arc deposition. Scripta Materialia, 61(8), 789-792. doi:10.1016/j.scriptamat.2009.06.031.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-F5C6-1

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