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Growth and erosion of amorphous carbon (a-C:H) films by low-temperature laboratory plasmas containing H and N mixtures

MPS-Authors
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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hopf,  C.
Experimental Plasma Physics 4 (E4), Max Planck Institute for Plasma Physics, Max Planck Society;
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sun,  C.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger.pdf
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Citation

Schwarz-Selinger, T., Hopf, C., Sun, C., & Jacob, W. (2007). Growth and erosion of amorphous carbon (a-C:H) films by low-temperature laboratory plasmas containing H and N mixtures. Journal of Nuclear Materials, 363-365, 174-178. Retrieved from http://dx.doi.org/10.1016/j.jnucmat.2007.01.005.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-0600-1
Abstract
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