Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF 
Plasma

Osiac, M.; Schwarz-Selinger, T.; O'Connell, D.; Heil, B.; Petrovic, Z. L.; Turner, M. M.; Gans, T.; Czarnetzki, U.

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Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma

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Schwarz-Selinger, T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Osiac, M., Schwarz-Selinger, T., O'Connell, D., Heil, B., Petrovic, Z. L., Turner, M. M., et al. (2007). Plasma Boundary Sheath in the Afterglow of a Pulsed Inductively Coupled RF Plasma. Plasma Sources Science Technology, 16, 355-363. Retrieved from http://dx.doi.org/10.1088/0963-0252/16/2/019.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-07BE-2

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