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Journal Article

Particle-growth in hydrogen-methane plasmas

MPS-Authors
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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Shimizu.pdf
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Citation

Shimizu, T., Jacob, W., Thomas, H., Morfill, G., Abe, T., Watanabe, Y., et al. (2006). Particle-growth in hydrogen-methane plasmas. Thin Solid Films, 506-507, 652-655. Retrieved from http://dx.doi.org/10.1016/j.tsf.2005.08.059.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-1053-D
Abstract
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