Quantitative determination of mass-resolved ion densities in H2-Ar inductively 
coupled radio frequency plasmas

Sode, M.; Schwarz-Selinger, T.; Jacob, W.

doi:10.1063/1.4794165

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Quantitative determination of mass-resolved ion densities in H₂-Ar inductively coupled radio frequency plasmas

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Sode, M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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http://dx.doi.org/10.1063/1.4794165
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Sode_Quantitative.pdf
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Sode, M., Schwarz-Selinger, T., & Jacob, W. (2013). Quantitative determination of mass-resolved ion densities in H₂-Ar inductively coupled radio frequency plasmas. Journal of Applied Physics, 113: 093304 (18pp). doi:10.1063/1.4794165.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-DD84-6

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