Operational limit of a planar DC magnetron cluster source due to target erosion

Rai, A.; Mutzke, A.; Bandelow, G.; Schneider, R.; Ganeva, M.; Pipa, A.; Hippler, R.

doi:10.1016/j.nimb.2013.08.027

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Operational limit of a planar DC magnetron cluster source due to target erosion

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Mutzke, A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

Bandelow, G.
Max Planck Society;

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Rai, A., Mutzke, A., Bandelow, G., Schneider, R., Ganeva, M., Pipa, A., et al. (2013). Operational limit of a planar DC magnetron cluster source due to target erosion. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 316, 6-12. doi:10.1016/j.nimb.2013.08.027.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-DF26-6

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