Erosion of tungsten-doped amorphous carbon films in oxygen plasma

Wang, P.; Jacob, W.; Balden, M.; Manhard, A.; Schwarz-Selinger, T.

doi:10.1016/j.jnucmat.2011.09.023

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Erosion of tungsten-doped amorphous carbon films in oxygen plasma

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Wang, P.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Balden, M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Manhard, A.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wang, P., Jacob, W., Balden, M., Manhard, A., & Schwarz-Selinger, T. (2012). Erosion of tungsten-doped amorphous carbon films in oxygen plasma. Journal of Nuclear Materials, 420(1-3), 101-109. doi:10.1016/j.jnucmat.2011.09.023.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-E407-5

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