In situ study of erosion and deposition of amorphous hydrogenated carbon films 
by exposure to the hydrogen atom beam

Markelj, S.; Pelicon, P.; Cadez, I.; Schwarz-Selinger, T.; Jacob, W.

doi:10.1116/1.4723637

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In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to the hydrogen atom beam

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Schwarz-Selinger, T.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;

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Markelj, S., Pelicon, P., Cadez, I., Schwarz-Selinger, T., & Jacob, W. (2012). In situ study of erosion and deposition of amorphous hydrogenated carbon films by exposure to the hydrogen atom beam. Journal of Vacuum Science and Technology A, 30: 041601 (8pp). doi:10.1116/1.4723637.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-E456-2

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