Mechanical and chemical investigation of the interface between tungsten-based 
metallizations and annealed borophosphosilicate glass

Völker, Bernhard; Heinz, Walther; Matoy, Kurt; Roth, R.; Batke, Johann Markus; Schöberl, Thomas; Cordill, Megan Jo; Dehm, Gerhard

doi:10.1016/j.tsf.2015.03.047

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Journal Article

Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass

MPS-Authors

/persons/resource/persons75388

Dehm, Gerhard
Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Völker, B., Heinz, W., Matoy, K., Roth, R., Batke, J. M., Schöberl, T., et al. (2015). Mechanical and chemical investigation of the interface between tungsten-based metallizations and annealed borophosphosilicate glass. Thin Solid Films, 583, 170-176. doi:10.1016/j.tsf.2015.03.047.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-B626-5

Abstract

There is no abstract available