Energy transfer into the growing film during sputter deposition: An 
investigation by calorimetric measurements and Monte Carlo simulations

Drusedau, T. P.; Bock, T.; John, T. M.; Klabunde, F.; Eckstein, W.

doi:10.1116/1.581957

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Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Drusedau, T. P., Bock, T., John, T. M., Klabunde, F., & Eckstein, W. (1999). Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations. Journal of Vaccum Science and Technology A, 17(5), 2896-2905. doi:10.1116/1.581957.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-84FD-9

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