Structure of Plasma-Deposited Amorphous Hydrogenated Boron-Carbon Thin Films

Annen, A.; Saß, M.; Beckmann, R.; von Keudell, A.; Jacob, W.

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Structure of Plasma-Deposited Amorphous Hydrogenated Boron-Carbon Thin Films

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von Keudell, A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Annen, A., Saß, M., Beckmann, R., von Keudell, A., & Jacob, W. (1998). Structure of Plasma-Deposited Amorphous Hydrogenated Boron-Carbon Thin Films. Thin Solid Films, 312, 147-155. Retrieved from http://www.sciencedirect.com/science/journal/00406090.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8734-D

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