Determination of the absolute CH3 radical flux emanating from a methane 
electron cyclotron resonance plasma

Pecher, P.; Jacob, W.

doi:10.1063/1.121713

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Determination of the absolute CH₃ radical flux emanating from a methane electron cyclotron resonance plasma

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Pecher, P.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Pecher, P., & Jacob, W. (1998). Determination of the absolute CH₃ radical flux emanating from a methane electron cyclotron resonance plasma. Applied Physics Letters, 73(1), 31-33. doi:10.1063/1.121713.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-882D-8

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