Sputtering of Pt by rare gas ions

Kulikauskas, V. S.; Mashkova, E. S.; Molchanov, V. A.; Khaidarov, A. A.; Chernysh, Y. S.; Eckstein, W.

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Sputtering of Pt by rare gas ions

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Kulikauskas, V. S., Mashkova, E. S., Molchanov, V. A., Khaidarov, A. A., Chernysh, Y. S., & Eckstein, W. (1998). Sputtering of Pt by rare gas ions. Izvestiya Akademii Nauk. Seriya Fizicheskaya, 62(7), 1425-1430.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8831-D

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