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The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets

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Keudell,  A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell, A. v., & Abelson, J. R. (1998). The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets. Journal of Applied Physics, 84(1), 489-495. doi:10.1063/1.368082.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-8833-9
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