Transport and structural modification during nitrogen implantation of hard 
amorphous carbon films

Grigull, S.; Jacob, W.; Henke, D.; Spaeth, C.; Summchen, L.; Sigle, W.

doi:10.1063/1.367338

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Transport and structural modification during nitrogen implantation of hard amorphous carbon films

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Jacob, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Grigull, S., Jacob, W., Henke, D., Spaeth, C., Summchen, L., & Sigle, W. (1998). Transport and structural modification during nitrogen implantation of hard amorphous carbon films. Journal of Applied Physics, 83(10), 5185-5194. doi:10.1063/1.367338.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8868-4

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