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Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

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Behrisch,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Behrisch, R., Grigull, S., Kreissig, U., & Grötzschel, R. (1998). Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 136-138, 628-632. doi:10.1016/S0168-583X(97)00798-2.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-88A2-F
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