Influence of surface roughness on measuring depth profiles and the total amount 
of implanted ions by RBS and ERDA

Behrisch, R.; Grigull, S.; Kreissig, U.; Grötzschel, R.

doi:10.1016/S0168-583X(97)00798-2

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Journal Article

Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA

MPS-Authors

/persons/resource/persons108660

Behrisch, R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Behrisch, R., Grigull, S., Kreissig, U., & Grötzschel, R. (1998). Influence of surface roughness on measuring depth profiles and the total amount of implanted ions by RBS and ERDA. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 136-138, 628-632. doi:10.1016/S0168-583X(97)00798-2.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-88A2-F

Abstract

There is no abstract available