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Multivariate analysis of noise-corrupted PECVD data

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von Keudell,  A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Annen,  A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Dose,  V.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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von Keudell, A., Annen, A., & Dose, V. (1997). Multivariate analysis of noise-corrupted PECVD data. Thin Solid Films, 307, 65-70. doi:10.1016/S0040-6090(97)00313-1.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8989-1
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