Multivariate analysis of noise-corrupted PECVD data

von Keudell, A.; Annen, A.; Dose, V.

doi:10.1016/S0040-6090(97)00313-1

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Journal Article

Multivariate analysis of noise-corrupted PECVD data

MPS-Authors

/persons/resource/persons109597

von Keudell, A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons108575

Annen, A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons108968

Dose, V.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

von Keudell, A., Annen, A., & Dose, V. (1997). Multivariate analysis of noise-corrupted PECVD data. Thin Solid Films, 307, 65-70. doi:10.1016/S0040-6090(97)00313-1.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8989-1

Abstract

There is no abstract available