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Journal Article

Deposition of amorphous hydrogenated carbon films due to hydrocarbon molecule ion-beam bombardment

MPS-Authors

Wang,  W.
Max Planck Society;

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Roth,  J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Plank,  H.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Wang, W., Roth, J., Eckstein, W., Schwoerer, R., Plank, H., & Du, M. (1997). Deposition of amorphous hydrogenated carbon films due to hydrocarbon molecule ion-beam bombardment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 129(2), 210-216. doi:10.1016/S0168-583X(97)00190-0.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-89B9-4
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