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Erosion behaviour and surface composition modifications of SiC under D+ ion bombardment

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Plank,  H.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwörer,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Roth,  J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Plank, H., Schwörer, R., & Roth, J. (1996). Erosion behaviour and surface composition modifications of SiC under D+ ion bombardment. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 111(1-2), 63-69. doi:10.1016/0168-583X(95)01258-3.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8D70-6
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