Temporal aspects of sputtering of TaC targets

Vichev, R. G.; Eckstein, W.

doi:10.1016/0168-583X(94)00796-9

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Temporal aspects of sputtering of TaC targets

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Eckstein, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Vichev, R. G., & Eckstein, W. (1995). Temporal aspects of sputtering of TaC targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 102(1-4), 272-276. doi:10.1016/0168-583X(94)00796-9.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8E91-9

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