English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Journal Article

Temporal aspects of sputtering of TaC targets

MPS-Authors
/persons/resource/persons109001

Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

External Resource
No external resources are shared
Fulltext (restricted access)
There are currently no full texts shared for your IP range.
Fulltext (public)
There are no public fulltexts stored in PuRe
Supplementary Material (public)
There is no public supplementary material available
Citation

Vichev, R. G., & Eckstein, W. (1995). Temporal aspects of sputtering of TaC targets. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 102(1-4), 272-276. doi:10.1016/0168-583X(94)00796-9.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8E91-9
Abstract
There is no abstract available