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Deposition of hydrogenated carbon layers from CH3+ ion beams

MPS-Authors

Wang,  W. M.
Max Planck Society;

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwörer,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Plank,  H.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Roth,  J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Wang, W. M., Eckstein, W., Schwörer, R., Plank, H., & Roth, J. (1995). Deposition of hydrogenated carbon layers from CH3+ ion beams. Journal of Nuclear Materials, 220-222, 1033-1037. doi:10.1016/0022-3115(94)00468-4.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8EDF-E
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