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The role of ions the deposition of hydrocarbon films, investigated by in situ ellipsometry

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Keudell,  A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell, A. v. (1995). The role of ions the deposition of hydrocarbon films, investigated by in situ ellipsometry. In H., Atwater, J., Dickinson, & D., Lowndes (Eds.), Film Synthesis and Growth using Energetic Beams (pp. 355-366).


引用: https://hdl.handle.net/11858/00-001M-0000-0027-8F89-6
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