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Running waveguide discharge for inner coating of metal tubes

MPS-Authors
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Möller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wilhelm,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Hytry, R., Möller, W., & Wilhelm, R. (1994). Running waveguide discharge for inner coating of metal tubes. Applied Physics Letters, 64(25), 3401-3403. doi:10.1063/1.111291.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9077-5
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