Möller, W. Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Wilhelm, R. Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;
Hytry, R., Möller, W., & Wilhelm, R. (1994). Running waveguide discharge for inner coating of metal tubes. Applied Physics Letters, 64(25), 3401-3403. doi:10.1063/1.111291.