Computer simulation of ion-beam assisted film growth

Möller, W.

doi:10.1016/0168-583X(94)95192-6

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Computer simulation of ion-beam assisted film growth

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Möller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller, W. (1994). Computer simulation of ion-beam assisted film growth. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 89(1-4), 322-324. doi:10.1016/0168-583X(94)95192-6.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-908D-4

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