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Backscattering and sputtering with the monte-carlo program TRIM.SP

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein, W. (1994). Backscattering and sputtering with the monte-carlo program TRIM.SP. Radiation Effects and Defects in Solids, 130, 239-250. doi:10.1080/10420159408219787.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9113-E
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