Modeling of ion-assisted deposition using BCA computer simulation

Möller, W.

doi:10.1080/10420159408219796

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Modeling of ion-assisted deposition using BCA computer simulation

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Möller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller, W. (1994). Modeling of ion-assisted deposition using BCA computer simulation. Radiation Effects and Defects in Solids, 130, 353-366. doi:10.1080/10420159408219796.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-912B-9

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