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Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane

MPS-Authors
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Lange,  K.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Lange, K., Jacob, W., & Moeller, W. (1993). Ion and Neutral Fluxes onto the Substrate from a DC Discharge in Methane. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1266-1271).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-91D6-5
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