Simultaneous Plasma and Surface Modeling of the Deposition of Hydrogenated 
Carbon Films from Methane

Moeller, W.; Keudell, A. von; Engelhardt, M.

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Simultaneous Plasma and Surface Modeling of the Deposition of Hydrogenated Carbon Films from Methane

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Moeller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell, A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

Engelhardt, M.
Max Planck Society;

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Moeller, W., Keudell, A. v., & Engelhardt, M. (1993). Simultaneous Plasma and Surface Modeling of the Deposition of Hydrogenated Carbon Films from Methane. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1662-1667).

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-91DA-E

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