Modeling the elementary steps of low-pressure diamond deposition

Biener, J.; Schubert, U. A.; Schenk, A.; Winter, B.; Lutterloh, C.; Küppers, J.

doi:10.1002/adma.19930050909

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Modeling the elementary steps of low-pressure diamond deposition

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Biener, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

Schubert, U. A.
Max Planck Society;

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Schenk, A.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Winter, B.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Lutterloh, C.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Küppers, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Biener, J., Schubert, U. A., Schenk, A., Winter, B., Lutterloh, C., & Küppers, J. (1993). Modeling the elementary steps of low-pressure diamond deposition. Advanced Materials, 5(9), 639-643. doi:10.1002/adma.19930050909.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-921F-E

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