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Moving‐coil waveguide discharge for inner coating of metal tubes

MPS-Authors
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Hytry,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wilhelm,  R.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell,  A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hytry, R., Möller, W., Wilhelm, R., & Keudell, A. v. (1993). Moving‐coil waveguide discharge for inner coating of metal tubes. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 11(5), 2508-2517. doi:10.1116/1.578600.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9229-5
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