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The effect of target texture and topography on the spatial distribution of material sputtered from tungsten

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Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein, W., Mashkova, E. S., Molchanov, V. A., Sidorov, A. V., & Zhukova, Y. N. (1993). The effect of target texture and topography on the spatial distribution of material sputtered from tungsten. Applied Physics A: Materials Science & Processing, 57(3), 271-277. doi:10.1007/BF00332602.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-922D-E
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