English
 
User Manual Privacy Policy Disclaimer Contact us
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT

Released

Journal Article

Sputtering yield increase with target temperature for Ag

MPS-Authors
/persons/resource/persons108660

Behrisch,  R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109001

Eckstein,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

Locator
There are no locators available
Fulltext (public)
There are no public fulltexts available
Supplementary Material (public)
There is no public supplementary material available
Citation

Behrisch, R., & Eckstein, W. (1993). Sputtering yield increase with target temperature for Ag. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 82(2), 255-258. doi:10.1016/0168-583X(93)96027-A.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9265-C
Abstract
There is no abstract available