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Ion stimulated densification of amorphous carbon films

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Möller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Ullmann, J., Wolf, G. K., & Möller, W. (1993). Ion stimulated densification of amorphous carbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1507-1510. doi:10.1016/0168-583X(93)90831-P.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9273-C
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