Plasma and surface modeling of the deposition of hydrogenated carbon films from 
low-pressure methane plasmas

Möller, W.

doi:10.1007/BF00331402

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Plasma and surface modeling of the deposition of hydrogenated carbon films from low-pressure methane plasmas

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Möller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller, W. (1993). Plasma and surface modeling of the deposition of hydrogenated carbon films from low-pressure methane plasmas. Applied Physics A - Materials Science & Processing, 56(6), 527-546. doi:10.1007/BF00331402.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-9275-8

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