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Journal Article

Plasma-Enhanced Chemical-Vapor-Deposition

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Möller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller, W. (1993). Plasma-Enhanced Chemical-Vapor-Deposition. Applied Physics A - Materials Science & Processing, 56(6), 469-469. doi:10.1007/BF00331397.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-9277-4
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