Deposition of dense hydrocarbon films from a nonbiased microwave plasma

Keudell, A. von; Möller, W.; Hytry, R.

doi:10.1063/1.108525

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Deposition of dense hydrocarbon films from a nonbiased microwave plasma

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Keudell, A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hytry, R.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell, A. v., Möller, W., & Hytry, R. (1993). Deposition of dense hydrocarbon films from a nonbiased microwave plasma. Applied Physics Letters, 62(9), 937-939. doi:10.1063/1.108525.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-92C6-3

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