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Sputtering and surface science

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Taglauer,  E.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Taglauer, E. (1993). Sputtering and surface science. In Fundamental Processes in Sputtering of Atoms and Molecules (pp. 643-657).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-931D-A
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