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Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma.

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Engelhard, M. (1993). Messung und Modellierung absoluter Radikaldichten in einem ECR-Methanplasma. PhD Thesis, Max-Planck-Institut für Plasmaphysik, Garching (DE).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9323-7
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