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Ionenenergieverteilungen aus einem ECR-Plasma und ihr Einfluß auf das Schichtwachstum von C:H Schichten. - Ion energy distributions in an ECR-plasma and their influence on the deposition of C:H-films.

MPS-Authors

Reinek,  P.
Max Planck Society;

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Reinek, P. (1992). Ionenenergieverteilungen aus einem ECR-Plasma und ihr Einfluß auf das Schichtwachstum von C:H Schichten. - Ion energy distributions in an ECR-plasma and their influence on the deposition of C:H-films. PhD Thesis, Technische Universität München, München (DE).


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-9464-9
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