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Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma

MPS-Authors

Schelz,  S.
Max Planck Society;

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Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Möller,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Reinke, P., Schelz, S., Jacob, W., & Möller, W. (1992). Influence of a direct current bias on the energy of ions from an electron cyclotron resonance plasma. Journal of Vacuum Science and Technology A: Vacuum Surfaces and Films, 10(3), 434-438. doi:10.1116/1.578167.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-94F0-D
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